Dali Vacuum Equipment LTD.

  • DZS-Optical Coating Machine
DZS-Optical Coating Machine
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DZS-Optical Coating Machine

Optical coating machine suitable for plating a variety of optical flms. Such as telescope, eye lens, opticallens, cold cup,etc, configuration is different The evaporation source and film thickness instrument, can be plated a variety of film system, metal, oxide, compound and other high melting point film material can be into Line evaporation, and can be plated on the surface of the alass superhard filmm

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DESCRIPTION

Product Information

Optical coating machine suitable for plating a variety of optical flms. Such as telescope, eye lens, opticallens, cold cup,etc, configuration is different The evaporation source and film thickness instrument, can be plated a variety of film system, metal, oxide, compound and other high melting point film material can be into Line evaporation, and can be plated on the surface of the alass superhard filmm

 

Mechanical parameters

MODEL

DZS-900

DZS-1200

Vacuum chamber size

?900x1050mm                               ?1200x1250mm

 

max vacuum degrees

3x10??Pa

Restore the vacuum pumping time

No load, pumped by air to 2x10?²Pa

Baking system

Top heating mode, PID control, maximum 350℃

Form and power of evaporation source

Resistive evaporation, 2 pairs of water cooled electrodes can hold 2 steam Fazhou, 5KW each

Resistance type evaporation, 4 pairs of water-cooled electrodes can hold 4 evaporation boats, each 5KW

High pressure ion bombardment

DC 3KV,5KW rod cathode used for cleaning the workpiece before coating

Ion source (optional)

5KW Hall ion source, used for coating cleaning or auxiliary coating process, is conducive to improving

Workpiece fixture form

Spherical cap type, simplex disk, rotation 5-30r/min Continuously variable speed

Spherical cap type, three-piece disk, planetary male rotation, 5-30r/min, Continuously variable speed

Working gas charging

Mass flow control instrument

Vacuum measuring system

Digital display composite vacuum gauge

electrical control gear

The post-vacuum system and resistance evaporation are automatically controlled by PLC, and the

installed power

50

70

Floor area (m)

about3.5x3

about4x3.5

 

Finished products

 

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